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When the system pressure is below the triple point pressure, direct phase change between solid and vapor can occur. The process whereby solid is vaporized without going through the liquid phase is referred to as sublimation. The process whereby a vapor phase turns to solid is referred to as deposition, which is the opposite process of sublimation.<br>
When the gaseous precursors are absorbed by a heated substrate – where a chemical reaction takes place – the nucleation and lattice incorporation leads to formation of a solid film. This process is referred to as Chemical Vapor Deposition (CVD).<br>

*<b>[[Sublimation]]</b>
:Sublimation over a [[Sublimation over a Flat Plate|flat plate]] and in a [[Sublimation inside an Circular Tube|circular tube]], and [[Sublimation with Chemical Reaction|sublimation with chemical reaction]].
*<b>[[Chemical Vapor Deposition (CVD)]]</b>
:[[Basics of Chemical Vapor Deposition|Basics]], [[Governing Equations of Chemical Vapor Deposition|governing equations]], [[Transport Properties]], [[Chemical Vapor Deposition in Horizontal Reactor|CVD in horizontal reactor]], [[Chemical Vapor Deposition in Barrel Reactor|CVD in Barrel Reactor]], and [[Laser Chemical Vapor Deposition (LCVD)]].
*<b>[[Related topics to sublimation and vapor deposition|Related Topics]]</b>


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Back to [[Multiphase Systems]]. <br>

Back to [[Main Page|'''T'''hermal-'''F'''luids'''P'''edia Main Page]].

==References==

Faghri, A., and Zhang, Y., 2006, Transport Phenomena in Multiphase Systems, Elsevier, Burlington, MA.

==Further Reading==

==External Links==

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